Designed to meet today's stringent production requirements, the 900Series offers process flexibility typically found in R&D systems. The 900Series surpasses the criteria for deposition of thin films in application critical devices and other applications requiring the absolute in uniformity.
◆ Horizontal cathode and substrate orientation for gentle substrate fixturing
and varied substrate sizes
◆ 12×12-inch substrate area
◆ Capacity to process dimensional substrates up to 1.5-inch thick.
◆ High-rate DC magnetron sputtering and single or multiple -pass deposition features
◆ Capacity to process up to one 300mm wafers or multiple smaller wafers at a time
◆ High-speed batch processing
◆ Convenient wafer to pallet loading ability
◆ Optional high vacuum loadlock configuration
◆ Optional planetary substrate pallet provides unsurpassed film uniformity
The 900 Series system can be equipped with KDF's exclusive and innovative ERPP™(enhanced rotary planetary pallet), which provides greatly improved wafer uniformities. In tandem with KDF's cathodes, this pallet option can achievebetter than +/- 1% uniformities across the pallet and better than 0.5% repeatabilities between runs for dielectrics such as SiO2 and TiO2, compared with traditional pallet uniformities of +/- 15-20% for such materials.
The 900Series family also features a special application Focest Cathode™,originally developed
In line with your process
The most reliable in-line sputtering tools in the industry are developed and manufactured by KDF. All of KDF's systems are engineered to meet versatility and high throughput demands across a number of markets at the industry's lowest cost of ownership :
◆ Mainstram silicon ◆ Emerging materials
◆ Flat panel display ◆ Optical communications
Across all platforms, KDF's in-line batch sputtering systems are easier to use and maintain than cluster tools. KDF's solutions provide users with increased :
◆ Film uniformity ◆ Throughput
◆ Process stability ◆ ROI
◆ Automation ◆ Tool uptime
◆ Reliability ◆ Environmental health and safety benefits