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  Eutecnics ES-240 Automatic Inspection System
designed for inspecting wafers, reticles, flat panel displays. Benefits include: batch loads, ease of use, multiple illumination modes, including transmitted or reflected dark or bright field illumination, and flexibility in inspecting different size parts (from 10mm x 10mm to 250mm x250mm). Available with the ES-240 are numerous inspection algorithms, precision metrology, pattern inspection and defect detection. The system will detect pattern defects, surface particles, inclusions, scratches and stains. Detectable defects range in size from 0.5 microns to larger than 100 microns. Additional system features include: robotic handling option, auto review after inspection; easy-to-read flat panel display; output data to USB devices or via Ethernet. For companies that would like to evaluate the ES-240 system, Eutecnics will accept sample parts and provide inspection results at no charge.


  The Eutecnics Model EPD1020:
Small footprint automatic reticle inspection system. Simultaneous inspection of the back glass side and the front pellicle side of a reticle is performed in less than three minutes. The system can be operated as a stand-alone unit controlled by a laptop or host computer, or it can be integrated with a robotic gripper and operated as part of an automatic stocker-inspection station.




The Eutecnics Model EI-100 is a typical example of our newly developed series of cost-effective, in-line inspection systems. In the current application, a conveyor belt transports glass lenses, used in automobile lamps, to various stages of the fabrication process, then to the inspection station, and finally to a packaging station. The EI-100 inspection station can be located anywhere along the manufacturing path without impeding the production cycle.

In this example, the glass lenses, traveling at a rate of one per second, are picked up by a vacuum/pneumatic arm and placed into one of eight inspection "nests" within an indexing rotary table. During each cycle, one new lens is picked up, a previously loaded lens is inspected, while a third lens is either accepted and returned to the conveyor belt or rejected and placed on a recycling conveyor belt.

The system was designed so that it will not interfere with or impede the normal manufacturing flow. Inspection can be performed either on a sampling basis or for 100% of the parts depending on quality control requirements. The modular architecture can be readily modified to inspect parts as large as 10" x 6" or as small as 0.25" x 0.25".
















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