Mixing and Dilution System

The “Slurry” is a supply system for the CMP-area. The system will be used as a supply station or as a mixing station. “Slurry 200” is for safe handling of slurry as well as for the required mediums for mixing, for example KOH or H2O2, according to the current safety standards § 19 I WHG.

Supply Transport-Container Module

for the safe handling of acids, caustic solutions and solvents according to current safety standards § 19 I WHG.Depending on the application the housings can be designed for drum sizes of 60 l, 100 l, 200 l, as well as 500 l, and 1.000 l.The drum is connected in the housing under clean atmospheric conditions by a quick connector system.

Disposal for Daytanks

The disposal system is for safe and secure collection and storage of water endangered substances according to current security standards § 19 I WHG.  Depending on the demand and the disposal quantity the
system can be designed for collection drums of 20 l to 1.000 l.

Manual Etching and Cleaning System

The Fabbench HS is a wet process system for all current cleaning and etching processes in the semiconductor, optical and solar industry. It is also possible to integrate complex process modules and filtration. The possibility of a flexible configuration the Fabbench HS also makes it ideal equipment for research and development

Quartz Tube Cleaning System

The compact assembly of the process area and the small medium consumption rate, means the Rondus is also suitable for cleaning quartz slugs in glass fiber cable production.

 

(443-390)   경기도  수원시   영통구  신동   486번지    디지털엠파이어II   103동 506호,      TEL : 031-695-6245,     FAX : 031-695-6246  
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