HVM - 1200

Horizontal to Vertical Mass Transfe for 300mm

Universal design allows you to choose the FOUP of your choice, enabling equipment consistency throughout the fab.
Unique end effector contacts wafer within the SEMI spec exclusion zone requirements.
Control of the unit can be from the FOUP opener for ease of use.
Smooth, precise movement with closed loop control system, including constant monitoring of position and torque.
Unit can also be used as a convenient way to change FOUPs to assure cleanliness.
One year warranty from the leader in wafer handing.

  L3 - 1200

300mm 3 Stage Mass Transfer

Mactronix's new 3 stage mass transfer features a patented dual contamination level capability made possible by a unique dual retainer mechanism. The 3 stages combined with the unique contact points assures no cross contamination for processes that require separate contact points for each level. The colcr touchscreen features user defined maintained macros that assure the unit is always properly maintained and online diagnostics that facilitates easy sensor adjustments without the need for a laptop.
From an Operator standpoint, the touchscreen means ease of use. The graphical display combined with sensor feedback helps the Operator choose the right operational mode with a minimum of instruction. We call it I.C.S., our Intuitive Control System...available only from Mactronix!

 IDR - 1200

Wafer I.D. Reader

Integrated Notch finder with easy to service roller mechanism.
Dual Camera readers with integrated L.E.D. lighting for reliable results. All electric system, no air required. User defined macro capaiblities for Custom Recipe generation.
RS232 Communications standard. G.E.M. Communications available. Menu Driven Operator Interface. Small Footprint, C.P.U. can be placed under table. One Year Warranty Standard. Fits many boat styles. Product Video on C.D.Available.

(443-390)   경기도  수원시   영통구  신동   486번지    디지털엠파이어II   103동 506호,      TEL : 031-695-6245,     FAX : 031-695-6246  
  info@semion.co.kr
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